Abstract
Piezoelectric displacement contains hysteresis and creep properties. Therefore, a displacement sensor is indispensable in precise positioning devices; however, the additional space and cost are problems. On the other hand, self-sensing methods that utilize the piezoelectric actuator itself as the displacement sensor have been proposed. With these self-sensing methods, precise positioning becomes possible without an additional displacement sensor. We developed a self-sensing method utilizing the non-hysteresis relationship between the permittivity change and the piezoelectric displacement. Furthermore, a differential current measurement method using two piezoelectric elements with a bimorph actuator could improve the positioning accuracy. In this study, we examine the control of a positioning stage using two multilayered piezoelectric actuators by applying the differential current measurement method for self-sensing control. The results indicate that the differential current measurement method is effective for precise positioning control. The positioning errors due to hysteresis decreased from 0.8μm to 0.1μm for a 10μm displacement range. In addition, permittivity feedback control could compensate for the creep property.
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