Abstract
Lithium-ion batteries (LIBs) are widely used to power portable devices, microelectronics, vehicles, etc. With many advantages such as high surface area and improved charge transport, self-supported 3-D nanostructured metal oxides such as titania nanotubes (TiO2nts) are promising electrode materials for LIBs and their impact is particularly significant when considering the miniaturization of energy storage systems and the development of 3D microbatteries. This paper is dedicated to the fabrication of all-solid-state Li-ion microbatteries using modified TiO2nts as negative electrodes [1-9]. Effects of material selection and processing on the performance and reliability are presented as a means to develop conceptual guidelines to understand and improve microbattery designs. Different chemical modifications of nanotubes by doping processes, ALD technique and by the conformal electrodeposition of polymer electrolytes will be presented. The fabrication of full 3D all-solid-state microcells showing high electrochemical performance have been achieved and the development of the next generation of 3D flexible microbatteries will be also introduced.
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