Abstract
In order to realize real-time displacement measurement with high resolution, sinusoidal phase modulation and integrating-bucket method are introduced in the self-mixing interference (SMI) system firstly. The phase of the laser beam is modulated by an electro-optic modulator (EOM) in the external cavity. Theoretical analysis, simulation results and error evaluation are presented. Experimentally, the micro-displacement of a high-precision commercial PZT is reconstructed and the reconstruction accuracy is on the order of nanometers for displacements of a few micrometers.
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