Self-identification algorithm for zeolite-based thermal capacity gas sensor

Abstract

We demonstrate a new operation mode of thermal gas sensor based on thermal capacity extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating. The identification algorithm is a continuous-time closed-loop identification algorithm based on the instrumental variable principle.