Self-consistent particle simulation of RF discharge in argon based on detailed collision data

Abstract

In order to obtain reliable computational data comparable with experimental data, self-consistent particle simulations of rf discharge in argon are performed by using the most accurate numerical procedure together with the most detailed collision data that are available now. In electron-atom collisions not only elastic and ionizing collisions but also 25 exciting collisions are taken into consideration one by one. In ion-atom collisions both elastic and charge-exchange collisions are considered by using the model whose validity is ascertained by measured data. Since no ambiguous approximations or assumptions are used, the obtained results can be regarded as standard data for rf discharge simulation.