Abstract

In this research, we explore the use of SAM (Self-Assembled Monolayers) materials for improving the robustness of a tunneling accelerometer. For gold coated tip-gold sample, the results are comparable with expectations for tunneling between gold electrodes in air. Using SAM materials, the robustness of the tunnel tips in terms of reliability shows promise of improved characteristics.Keywordstunnelingself-assembled monolayers (SAM)microaccelerometerbarrier heightstability

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