Abstract
In this paper, one new type positioning stage is designed to improve the stroke and accuracy of ultra-precision positioning stage. The pneumatic metal bellows are used as a driving part, and the moving platform is supported with air guide sliders to realize larger stroke and ultra precision positioning with frictionless. The dynamic model of the system and the hysteresis model on the basis of PI model are provided and the corresponding parameters of PI model are optimized and identified according to the initial loading curve. Additionally, the self-adaptive controller with hysteresis compensation is designed to improve the dynamic characteristics of the system and the corresponding PID parameters are optimized according to the reference model. The experimental results with sawtooth signal and multiple frequency signals on the positioning stage show that, in the presence of the self-adaptive controller with hysteresis compensation, the maximum tracking error is 1.57μm and the average error is 0.77μm on sawtooth signal, while the maximum error is 0.92μm and the average error is 0.58μm on multiple frequency signal, so the proposed method can achieve high performance of the ultra-precision positioning.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
