Self-similar reconfigurable low-pass MEMS filters using coplanar waveguide based on silicon

Abstract

This paper presents a low-pass filter based on microelectromechanical system using periodic self-similar coplanar waveguide. The device is fabricated on 525-μm high-resistivity silicon substrate using surface micromachining process which partial compatible process with IC. The tunable resonant frequency is achieved using micro-electromechanical contact capacitive switches. The total area of the filter is about 6 mm2 including bias lines and pads. The parameters of the filter has been analyzed byapplying the Ansoft-HFSS. When switch is on original state, the measured results of the filter show that the 3-dB cutoff frequency is 16.15 GHz with the average insertion loss of 0.95 dB. The 3 dB cut-off frequency of the reconfigurable filters is 22.85 GHz with the average insertion loss of 2.33 dB. A relativelylowerdriven voltage is around 26 V.