Abstract
A growth model and parameters obtained in our previous experimental (STM) and theoretical (Kinetic Monte Carlo simulations) studies of Ag/Si(1 1 1)-(7 × 7) heteroepitaxy were used to optimize growth conditions (temperature and deposition rate) for the most ordered self-organized growth of Ag island arrays on the (7 × 7) reconstructed surface. The conditions were evaluated by means of KMC simulations using the preference in occupation of half-unit cells (HUCs) of F-type as a criterion of island ordering. Morphology of experimentally prepared island structures was studied by STM. High degree of experimentally obtained island ordering is compared with the simulated data and results are discussed with respect to the model and parameters used at the KMC simulations.
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