Abstract
The steady-state regime of condensation under conditions close to the phase equilibrium is shown to be provided by the self-organization of the plasma-condensate system. This self-organization is associated with the fact that the presence of the plasma leads to a considerable increase in the energy of adatoms and, hence, in the temperature of the growth surface in the course of their condensation. The increase in the temperature is compensated by the desorption flow of adatoms responsible for the supersaturation. It is demonstrated that the proximity of the system to the phase equilibrium ensures the selective regime of condensation during which the adatoms are attached onto active centers of the growth surface, thus forming various three-dimensional structures.
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