Abstract

Copper nanosystems were obtained by means of magnetron sputtering and further deposition of extremely weak vapour fluxes onto glass ceramic substrates and KCl cleaved facets. The increased pressure (∼10Pa) of highly purified argon, low discharge powers (∼24W) of the magnetron sputterer, as well as relatively high growth surface temperature (∼653K) have been used during the technological process. The mechanisms of structure formation on different substrates were analysed by SEM, TEM and electron and x-ray diffraction. To explain the self-organization of low-dimensional systems we developed a mathematical model of mass transfer of sputtered substance within the space between the magnetron sputterer and substrate. On the basis of experimental and modelling studies it was found that Ostwald ripening of Cu nanocrystal systems is possible to realize on KCl (001) cleaved facets under conditions of critically low supersaturations and at increased concentration of nucleation sites.

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