Self-marked preparation of site-specific transmission electron microscope lamellae of nanodevices using focusing ion beam technique.

Abstract

The precise extraction of a thin slice (lamellae) from nano electronic devices using a focused ion beam (FIB) is crucial for transmission electron microscopy analysis, but it remains a challenge for 100nm and beyond scale device components. In this study, we introduce a new method that utilises the device's own features as markers during FIB thinning process by continuously monitoring the intermediate structures with secondary electron scanning electron microscopy (SE-SEM) imaging. This allows for the targeted extraction of the desired device component with high precision. We successfully demonstrate the effectiveness of this approach by extracting lamellae from 100nm length channel in arrayed carbon nanotube film field-effect transistors using FIB lift-out.