Abstract

Modified particle and power balance equations including multi-step ionizations are derived and solved in a self-consistent manner. According to the modified balance equations, the electron temperature (Te) decreases with the electron density (ne) to balance between the generation and the loss of an electron-ion pair. The multi-step ionizations give rise to the decrease in the collisional energy loss per electron-ion pair created (εc) so that the electron density is rapidly increased compared to when only single step ionization is considered. The effect of neutral pressure on the multi-step ionizations is presented and discussed.

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