Self-consistent calculation of the optical emission spectrum of an argon capacitively coupled plasma based on the coupling of particle simulation with a collisional-radiative model

Abstract

We report the development of a computational framework for the calculation of the optical emission spectrum of a low-pressure argon capacitively coupled plasma (CCP), which is based on the coupling of a particle-in-cell/Monte Carlo collision simulation code with a diffusion-reaction-radiation code for Ar I excited levels. In this framework, the particle simulation provides the rates of the direct and stepwise electron-impact excitation and electron-impact de-excitation for 30 excited levels, as well as the rates of electron-impact direct and stepwise ionization. These rates are used in the solutions of the diffusion equations of the excited species in the second code, along with the radiative rates for a high number of Ar-I transitions. The calculations also consider pooling ionization, quenching reactions, and radial diffusion losses. The electron energy distribution function and the population densities of the 30 excited atomic levels are computed self-consistently. The calculations then provide the emission intensities that reproduce reasonably well the experimentally measured optical emission spectrum of a symmetric CCP source operated at 13.56 MHz with 300 V peak-to-peak voltage, in the 2–100 Pa pressure range. The accuracy of the approach appears to be limited by the one-dimensional nature of the model, the treatment of the radiation trapping through the use of escape factors, and the effects of radiative cascades from higher excited levels not taken into account in the model.