Self-conditioning performance of hydrophilic fixed abrasive pad

Abstract

Self-conditioning performance is one of the key properties of hydrophilic fixed abrasive (FA) pad, which affects greatly on lapping efficiency and surface quality of lapped work-piece. In order to explore the quantitative relationship between the self-conditioning performance of hydrophilic FA pad and process parameters, the material removal rate variation (MRRV) of work-piece was proposed to characterize the self-conditioning performance of the hydrophilic FA pad in a series of marathon tests. The correlations between MRRV and the factors, which are diamond particle size, pore forming additive, applied load, copper content in the pad, triethanolamine (TEA) content in the slurry and FA lapping parameters, were explored with the orthogonal regression experiments method. The results indicate that the relative significance factors affecting the self-conditioning performance are triethanolamine content of slurry and applied load, respectively.