Self-Catalytic Growth of TiO[sub 2−δ] Nanobelts and Nanosheets Using Metallorganic Chemical Vapor Deposition

Abstract

Titania TiO2� nanobelts and nanosheets were self-catalytically grown at 510°C on Si100 substrates using metallorganic chemical vapor deposition. The shape of the TiO2� nanofeatures was critically affected by the growth chamber pressure. Thin sheets and rectangular bar-like nanobelts were grown at 1.2 and 10 Torr, respectively. Meanwhile, with an increase in the growth chamber pressure to 100 Torr, thin-film growth became predominant and no nanobelts were observed. The nanobelts and the nanosheets consisted of 10 to 30 nm anatase and rutile nanocrystallites seemed to be controlled by a vapor-solid growth mechanism.