Abstract
Patterned Ni80Fe20 permalloy films with strip length of 5 mm, strip distance of 40μm and various ferromagnetic (FM) strip widths from 20 to 40μm were prepared by pulse laser deposition and photolithography for study the microwave performance of permalloy films. Comparing with the continuous magnetically isotropic permalloy film, the anisotropy fields HK increase with the decrease of the FM strips’ width. As a result, the ferromagnetic resonance frequency fr is enhanced from 1.71 GHz of continuous film to 2.1 GHz of patterned film with FM strip width of 20μm. The comparison between fr and HK demonstrates that the enhancement of fr can be attributed to the increase of HK due to the shape anisotropy of permalloy strips.
Highlights
With the electronic information technology developing towards high integration, high complexity, miniaturization, light weight, high-performances, multi-functions and high frequency, more and more components are required to be integrated in a smaller substrate.[1]
The shape anisotropy induced the change HK increased with the FM strip width narrowing down from 40 to 20 μm, which results in HK up to 60 Oe and an enhance up to 2.1GHz in permalloy thin films with FM strip width of 20 μm
The strongest diffraction peak at 44.4o was observed for the two kinds of permalloy films, which is consistent with the (111) peak of standard X-ray diffraction (XRD) data of permalloy
Summary
With the electronic information technology developing towards high integration, high complexity, miniaturization, light weight, high-performances, multi-functions and high frequency, more and more components are required to be integrated in a smaller substrate.[1]. The magnetic field generators, which usually have a heavy weight and/ or large power consumption, should be removed from MMICs for satisfying the miniaturization, light weight and low power loss.[4] metal SMFs with endogenous magnetic anisotropy draw an increasing attention because, on the one hand, the endogenous magnetic anisotropy results in a good microwave magnetic properties in zero-bias magnetic field, on the other hand, metal films have good compatibility with MMIC process.[5,6] Various methods are developed to obtain large endogenous magnetic anisotropy field HK, such as in-situ magnetic field deposition,[7,8,9] post magnetic field annealing,[10,11] oblique sputtering,[12,13,14] composition gradient sputtering,[15,16] Interface coupling,[17,18] magnetoelectric coupling,[19,20] Stress induced,[21] and pattern processing,[22,23] etc. The shape anisotropy induced the change HK increased with the FM strip width narrowing down from 40 to 20 μm, which results in HK up to 60 Oe and an enhance up to 2.1GHz in permalloy thin films with FM strip width of 20 μm
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