Abstract
Soft magnetic films (SMFs) are key materials for miniaturization and multifunctionality of radio frequency and microwave components and integrated circuits (ICs) due to the good high-frequency soft magnetic performances and the compatibility to IC processing technologies. Magnetic micro-inductors are one of widely used microwave IC components. The SMFs in magnetic micro-inductors should have a well-defined in-plane uniaxial magnetic anisotropy in order to reach a high ferromagnetic resonance frequency f FMR . On the other hand, a high permeability is only available when excitation magnetic field being along the magnetic hard-axis (HA) direction, i.e. HA excitation. However, the typical planar micro-inductors are round or square, the magnetic anisotorpy characterisitics of the SMFs above indicates that the efficiency of SMFs can only reach 50% in inductors. Although many attempts have been made to enhance the efficiency of SMFs in inductors,1 100% HA excitation is still difficult to be reached.
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