Self-assembled zinc oxide nanodots on silicon oxide

Abstract

Self assembled ZnO nanodots are grown by electron beam evaporation of Zn on thermally oxidized silicon substrates and subsequent annealing in oxygen. Characterization by TEM and EELS shows that the quantum dots are indeed zinc oxide single crystals grown with their c-axis perpendicular to the substrate; their distribution and size depends on the deposition parameters of zinc onto the substrates.