Abstract

In-volume, self-assembled, three-dimensional, periodic micro-nano structures are induced in quartz crystal by tightly focused, 500-kHz femtosecond laser pulses. With suitable pulse energy, three different types of periodic structures can be observed in modified regions using scanning electron microscopy. The first one with period (ΛE) of ~400 nm in the direction of the laser polarization, i.e. nanograting, shows indicative features similar to that in fused silica. The second one with period (ΛS) in the scan direction and the third one with period (Λk) in the laser propagation direction are both equally spaced by ~1 μm, which is close to the laser wavelength. Moreover, the structure with period (Λk) covers almost the whole cross-section of modified regions, which is distinctive to that observed in fused silica. Through the comparison of the structures induced by 1-kHz pluses and those by 500-kHz pluses, we deduce that the heat accumulation effect may have a positive influence on the formation of nanogratings in quartz crystal.

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