Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments

Abstract

Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization and reliability of many micro-electro-mechanical systems (MEMS) devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics of the coated microstructures are described, followed by a discussion of the current limitations, areas for improvements and recent progress for this coating technology.