Self-assembled aerogel-like low dielectric constant films

Abstract

A series of new spin-on nanoporous silica films with controlled porosity and dielectric constants were prepared by evaporation induced self-assembly (EISA) during spin-coating. Starting with a homogeneous solution of soluble silica and surfactant/swelling agent prepared in an alcohol/water solvent, preferential evaporation of alcohol during spin-coating results in the hierarchical self-assembly of surfactants plus swelling agent and soluble silica into a templated microemulsion system. Silicate polymerization followed by removal of surfactant and swelling agents via immediate calcination results in a highly porous silica film of the liquid crystalline assembly with controlled porosity ranging from 50% to 90% and dielectric constant ranging from 1.3 to 2.6. TEM and surface acoustic wave (SAW) techniques were used to characterize the microstructure of the films. The dielectric constant, Young's modulus, and hardness of the final films are also discussed.