Self‐Aided Batch Growth of 12‐Inch Transfer‐Free Graphene Under Free Molecular Flow

Abstract

AbstractDirect synthesis of large‐area graphene on functional substrates via chemical vapor deposition has become a frontier research stream targeting practical applications. However, the batch production of transfer‐free graphene film with favorable quality and homogeneity remains a grand challenge. Herein, the direct growth of 12‐inch‐sized graphene is demonstrated over fused quartz in a batch manner. The key design of the synthetic route is the construction of a nano‐scale compartment to allow the formation of free molecular flow during growth, as well as to trap the hydroxyl species in situ released from the quartz substrates. Density functional theory calculations reveal that the hydroxyl species help decrease the energy barrier for feedstock decomposition and facilitate the carbon attachment to boost graphene growth. Thus‐prepared graphene possesses excellent optical transmittance (96% ± 1%) and electrical properties (1.22 ± 0.08 kΩ sq‒1). These findings unlock new opportunities for achieving batch production of graphene‐skinned functional materials with practical scalability and quality toward emerging uses.