Abstract

Here we present a novel concept for the selective recognition of different target gases with a multilayer semiconducting metal oxide (SMOX)-based sensor device. Direct current (DC) electrical resistance measurements were performed during exposure to CO and ethanol as single gases and mixtures of highly porous metal oxide double- and single-layer sensors obtained by flame spray pyrolysis. The results show that the calculated resistance ratios of the single- and double-layer sensors are a good indicator for the presence of specific gases in the atmosphere, and can constitute some building blocks for the development of chemical logic devices. Due to the inherent lack of selectivity of SMOX-based gas sensors, such devices could be especially relevant for domestic applications.

Highlights

  • Recent years witnessed an explosion of the consumer microelectromechanical systems (MEMS)sensor market as the cell phone evolved into a powerful computer and the development of smart devices started

  • Direct current (DC) electrical resistance measurements on combinations of double- and single-layer sensors showed that the double-layers respond differently to exposure of CO and ethanol in comparison showed that the double-layers respond differently to exposure of CO and ethanol in comparison to to the corresponding single-layer sensors, of which they consist. This fact was used to identify the the corresponding single-layer sensors, of which they consist. This fact was used to identify the presence of ethanol during CO measurement, which is especially important in domestic applications

  • Presence of ethanol during CO measurement, which is especially important in domestic. It was realized by calculating resistance ratios of the single and double-layer sensors

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Summary

Introduction

Recent years witnessed an explosion of the consumer microelectromechanical systems (MEMS)sensor market as the cell phone evolved into a powerful computer and the development of smart devices started. For gas sensors based on Semiconducting Metal Oxides (SMOX), these developments open up new application fields such as indoor air quality monitoring in smart buildings or car ventilation, etc., as their use offers many advantages. These include high sensitivity to many toxic or explosive gases, simple measuring technique, the possibility for miniaturization and mass production, low cost, etc. Interfering gases—even if they are only present in trace amounts—and variations in the background level of humidity can significantly change the sensor signal, which leads to uncertainty in the interpretation of sensor data This is especially a problem in new application fields; for instance, when sensors are integrated into buildings. The method is based on the fact that ethanol or other volatile organic compounds (VOCs) are far more reactive to surface-catalyzed decomposition than

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