Selective formation of porous layer on n-type InP by anodic etching combined with scratching

Abstract

The selective formation of porous layer on n-type InP (0 0 1) surface was investigated by using scratching with a diamond scriber followed by anodic etching in deaerated 0.5 M HCl. Since the InP specimen was highly doped, the anodic etching proceeded in the dark. The potentiodynamic polarization showed the anodic current shoulder in the potential region between 0.8 and 1.3 V (SHE) for the scratched area in addition to the anodic current peak at 1.7 V (SHE) for the intact area. The selective formation of porous layer on the scratched are was brought by the anodic etching at a constant potential between 1.0 and 1.2 V (SHE) for a certain time. The nucleation and growth of etch pits on intact area, however, took place when the time passed the critical value. The cross section of porous layer on the scratched area perpendicular to the [ 1 ¯ 1 0 ] or [1 1 0] scratching direction had a V-shape, while the cross section of porous layer on the scratched area parallel to the [ 1 ¯ 1 0 ] or [1 1 0] scratching direction had a band structure with stripes oriented to the [ 1 ¯ 1 1 ] or [ 1 1 ¯ 1 ] direction. Moreover, nano-scratching at a constant normal force in the micro-Newton range followed by anodic etching showed the possibility for selective formation of porous wire with a nano-meter width.