Abstract
A lot of energy harvesting devices using electret material has been developed. Since the power from the electret energy harvester is proportional to the surface charge concentration, i.e. charged voltage on the electret, frequency and dynamic range of the capacitance change. To fabricate the electret, the corona discharge is a very popular charging method that consists of a high voltage needle for corona ions generation, and a grid electrode applying a bias voltage that implants the electrons from corona ions to the electret material. In this study, we introduce a novel charging method with fine patterns using the buried gridelectrodes applied with a bias voltage. We also describe FEM analysis and experimental results.
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