Abstract
We propose and demonstrate a novel device structure of resonant cavity-enhanced photodetector (RCE-PD). The new RCE-PD structure consists of a bottom distributed Bragg reflector (DBR), a cavity with InGaAs multiple quantum wells (MQWs) for light absorption and a top mirror of sub-wavelength grating. By changing the fill factor of the 2-D grating, the effective cavity length of RCE-PDs can be varied so the resonant wavelength can be selected post growth. Accordingly, we can fabricate an array of PDs on a single chip, on which every PD aims for a specific wavelength.
Highlights
Resonant cavity-enhanced photodetectors (RCE-PDs) have been studied for long because they offer the attractive advantages over conventional p-i-n photodetectors in terms of high-speed and high quantum efficiency [1,2,3]
We propose and demonstrate a novel device structure of resonant cavity-enhanced photodetector (RCE-PD)
The new RCE-PD structure consists of a bottom distributed Bragg reflector (DBR), a cavity with InGaAs multiple quantum wells (MQWs) for light absorption and a top mirror of sub-wavelength grating
Summary
Resonant cavity-enhanced photodetectors (RCE-PDs) have been studied for long because they offer the attractive advantages over conventional p-i-n photodetectors in terms of high-speed and high quantum efficiency [1,2,3]. Electrical control through Stark’s effect is superior because its resonant wavelength can be controlled even after the device processing [6,7] These two methods need high absorption layers which may slow down the response speed of devices. Tuning with heating effect may be low-cost but the reported tuning range is only 15.4 nm [8] Foland and his associates proposed that, by applying pressure on a 1-D grating mirror, the effective refractive index can be changed so the reflectivity peak can be adjusted [9]. We propose the use of GMR reflector as the top mirror of the RCE-PDs. As we shall present, this approach takes the advantage of much thinner thickness of GMR mirror, and provides a new and easy method to select the resonant wavelength of RCE-PDs. Because the cavity length is fixed after the sample growth, the resonant wavelength of conventional RCE-PDs with two DBRs is usually fixed. Received 9 Dec 2011; revised Jan 2012; accepted Jan 2012; published 30 Jan 2012 13 February 2012 / Vol 20, No 4 / OPTICS EXPRESS 3573
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