Abstract
This article presents investigations regarding the incorporation of organic impurities in thin electroplated Cu metallizations. RF-GD-OES (radio frequency glow discharge optical emission spectrometry) was used for detection of C and H as indicators for incorporated hydrocarbon molecules. The presented results indicate a fragmentation of incorporated hydrocarbons and their constrict segregation near the Cu surface. The bilateral relationship between incorporated organic impurities and intrinsic stress behavior is associated with the Gorky effect.
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