Abstract
Targets of Co67Cr7Fe4Si8B14 magnetic alloy were ablated in vacuum with an XeCl laser at different jIuences ranging from 2.5 to 7 J/cm2 The ablated material was collected onto unheated silicon substrates placed at different angles with respect to the nonnal o/the target at the incident laser spot. Film composition was inferred by Rutheiford backscattering spectrometry analyses. Experimental results reveal that the concentration of lighter elements is larger in films deposited at higher collecting angles. The observed effect is more evident at lower laser fluences. The compositional variations with collecting angle in the studied multi-elemental films are attributed to scaliering effects among the ablated chemical species in the plume.
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