Abstract
Modern TEM enables the investigation of nanostructures at the atomic scale. However, TEM images are only two-dimensional (2D) projections of a three-dimensional (3D) object. Electron tomography can overcome this limitation. The technique is increasingly focused towards quantitative measurements and reaching atomic resolution in 3D has been the ultimate goal for many years. Therefore, one needs to optimize the acquisition of the data, the 3D reconstruction techniques as well as the quantification methods. Here, we will review a broad range of methodologies and examples. Finally, we will provide an outlook and will describe future challenges in the field of electron tomography. L'évolution récente des MET permet d'explorer les nanostructures à l'échelle de l'atome. Cependant, les images obtenues ne sont que des projections bidimensionnelles d'objets 3D. La tomographie électronique permet de pallier cette limitation et se concentre de plus en plus sur les mesures quantitatives. De plus, la résolution atomique en 3D représentait depuis longtemps le but ultime en tomographie. Il est donc nécessaire d'optimiser l'acquisition des données, les techniques de reconstruction 3D ainsi que les méthodes de quantification. Nous allons passer en revue différentes méthodologies et exemples. Nous discuterons ensuite des perspectives et des nouveaux défis à relever dans ce domaine.
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