Abstract
Electron-gas SNMS offers favorable properties, often useful or even necessary for the depth profiling of optical coatings. A short introduction into this method, examples of SNMS depth profile analysis in the fields of composite oxide layers, control of complex thin film components, damage of coatings and characterization of multilayers for soft X-ray optics, as well as a report of ongoing developments are given, demonstrating the performance, the limits and the future potential of the SNMS depth profile analysis.
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