Abstract
Abstract An overview of secondary ion mass spectrometry (SIMS) is given. It is placed in context of other surface analytical techniques. The SIMS technique is divided into static, dynamic, and imaging SIMS. The basic operations, assumptions, and variations are explained with examples from the scientific literature. Problems associated with interpreting the collected data and the ways in which the data is interpreted are given. The recommendations from ASTM and ISO in the use of SIMS and interpretation of the data are referenced.
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