Secondary ion mass spectrometry investigation of carbon grain formation in boron nitride epitaxial layers with atomic depth resolution

Paweł Piotr Michałowski, Jacek Baranowski + Show 1 more

Open Access

https://doi.org/10.1039/c9ja00004f

Copy DOI

Journal: Annual Reports on Analytical Atomic Spectroscopy	Publication Date: Jan 1, 2019
Citations: 10	License type: CC BY-NC 3.0

Abstract

A refined SIMS procedure allows reaching atomic resolution and characterization of each layer in van der Waals structures separately.

Full Text

Published version (

Free)

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Paper Title

Journal

Date

Author