Abstract
Based on a review of recent domestic and international literature, examples of using secondary ion mass spectrometry (SIMS) for the determination of carbon and hydrogen in solving particular problems of geochemistry and space chemistry are presented. Special attention is paid to problems arising in calibration procedures for the quantitative determination of carbon and hydrogen by SIMS. A summary of equipment currently used for SIMS analysis is given. Mass spectral imaging method based on mathematical processing of the recorded secondary ion currents of carbon and hydrogen for visualizing 3D distributions of elements is considered in detail.
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