Abstract
We have observed positive secondary ion mass spectra from highly oriented pyrolytic graphite (HOPG) and hydrogen terminated Si (Si–H) surfaces irradiated with highly charged ions (HCIs). In the spectra from HOPG irradiated by HCIs of Xe q+ , carbon clusters up to C 5 + were observed in addition to hydrogenated carbon cluster peaks. On the other hand, in the spectra from the Si(1 1 1)–H, peaks of H + and H 2 + were detected dominantly with weak signals for C + and Si +. Strong dependence of peak intensities of these spectra on q were also observed. It is shown that sputtering phenomena are closely related to deposition of potential energy of HCIs onto the surfaces and the HCI-probe can be applied to the high sensitivity surface analysis.
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