Secondary electron emission from rough metal surfaces: a multi-generation model

Abstract

We develop a multi-generation model to examine secondary electron emission (SEE) from a rough metal surface. In this model, the traces of both primary electrons (PEs) and secondary electrons (SEs) are tracked by combining the electron scattering in the material and the multi-interaction with the rough surface. The effective secondary electron emission yield (SEY) is then obtained from the final states of the multi-generation SEs. Using this model, the SEE properties of the surfaces with rectangular and triangular grooves have been examined. We find that a rectangular groove can be used for effective SEE suppression. For a triangular groove, the criterion of SEY enhancement/suppression has been achieved, indicating that a small groove angle is required for effective SEE suppression, especially for a high PE energy. Furthermore, the SEE properties for some random rough surfaces are examined and some preliminary results are presented. Accordingly, our model and results could provide a powerful tool to give a comprehensive insight into the SEE of rough metal surfaces.