Abstract
Data are reported on the depth profile of the nonlinear optical capabilities (d33) of He+ ion-implanted LiNbO3 waveguides. Reflected second harmonic generated light has been measured for guides formed by implant doses ranging from 5×1014 to 2×1016 ions/cm2. Directly after the irradiation the nonlinearity in the waveguide region is reduced to ∼75% that of virgin LiNbO3 for doses higher than 3×1015 ions/cm2. At the optical barrier the nonlinearity becomes zero for doses above 1×1016 ions/cm2. Annealing at 200 °C completely recovers the nonlinearity of the waveguiding layer, as well as reducing absorption losses within the guide. For the highly disordered material in the barrier, the harmonic signal shows that only partial recovery of the structure occurs, even by annealing at higher temperatures. This difference in response allows the production of low loss waveguides with high nonlinearity.
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