Abstract

BaMgF4 is a ferroelectric nonlinear crystal with a very wide transparency window ranging from 125 nm to 13µm of the wavelength. Therefore, it is a candidate material to generate ultraviolet or deep ultraviolet laser, which is very important in lithography, semiconductor manufacturing, and advanced instrument development. Here, the second-order birefringence phase-matching processes of the BaMgF4 crystal were studied, including second-harmonic generation (SHG) and sum-frequency generation (SFG). In the experiments, we measured the phase-matching angle, nonlinear frequency conversion efficiency, and angle bandwidth of SHG and SFG processes of BaMgF4 crystal, which are in well agreement with the theoretical calculations. This study may promote the research of nonlinear optical process of BaMgF4 crystal and also the further development of all-solid-state vacuum ultraviolet lasers.

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