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Abstract
Suspended microfluidic resonators enable detection of fluid density and viscosity with high sensitivity. Here, a two-legged suspended microchannel resonator that probes pico-litres of liquid is presented. The higher resonant modes (flexural and torsional) were explored for increased sensitivity and resolution. Unlike other reported microchannel resonators, this device showed an increase in the quality factor with resonant frequency value. The performance of the resonator was tested by filling the channel with three liquids, one at a time, over a density range of 779−1110 kg m−3 and a viscosity range of 0.89−16.2 mPa s. The highest resolution obtained was 0.011% change in density. Measurements with torsional mode showed an improvement of about six times in sensitivity and about fifteen times in resolution compared to the first flexural mode. When the empty channel was filled with liquids of different viscosity, the quality factor of the first flexural mode remained overall constant with a variation below 3.3% between the fluids, and confirming the inherent property of suspended microchannel resonators. However, it significantly decreased for second flexural and torsional modes. No noticeable difference was observed in the quality factor between different liquid viscosities for all modes.
Highlights
IntroductionFor large volumes (>1 ml), density is typically measured by weighting a known volume of liquid
The characterization of the empty hollow cantilevers in vacuum showed an improvement in quality factor of about
It has a quality factor of about 1700 for the first flexural mode of vibration at 2.8 mbar surrounding pressure. These quality factors are found to increase with mode number
Summary
For large volumes (>1 ml), density is typically measured by weighting a known volume of liquid. For volumes around 1 ml, resonant based techniques, where change in the resonant frequency as a function of liquid density can be used, like vibrating glass tubes [5], surface acoustic waves [6, 7], tuning forks [8], quartz crystal microbalance [9] or thin film bulk acoustic waves [10]. For volumes around 1 μl, again resonant based methods that use microtube resonators [11], microcantilever resonators immersed in liquid [12]
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