Abstract

The goal of atom probe specimen preparation is to produce a needle-shaped specimen with an end radius of less than 50 nm on a smooth uniform shank with a taper angle of less than 5°. Neither the microstructure nor the solute distribution should be altered during fabrication. Traditionally, electropolishing has been the dominant method for producing these needles. Focused ion beam (FIB) instruments enable specimens to be fabricated from a wider range of materials and different forms [1].

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