Abstract
The interference pattern around micropipes of 6H-SiC single crystal (0 0 1) substrate has been characterized by polarizing optical microscopy. The interference pattern showed anisotropy around micropipes, which was thought to result from edge dislocation caused by internal strain. A model experiment using a stress-induced acryl resin board certainly demonstrated a similar interference pattern to the 6H-SiC single crystal, when tensile and compression stresses were applied to each side in the vicinity of an open hole in the acryl resin board. Stress distribution around the micropipe of 6H-SiC single crystal was discussed in connection with the existence of edge and screw dislocations. The size of the micropipe depended on the Burgers vector, and an internal strain generated around the micropipe was correlated with the edge dislocation.
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