Abstract
Ion Beam Figuring (IBF) for surface form error correction can be used for optics of different size. Thereby by a focused ion beam scans over the mirror surface in a meander-like path and removes the exact amount needed to correct form errors. We will give an overview about the technical aspects regarding system design for doing IBF on small and big optics. Next generation x-ray telescopes consist of ten thousands of single silicon mirrors. Each of those mirrors need individual ion beam figuring. Since the mirrors are about 100 mm in size and light-weight, they can be easily moved in front of the ion beam source. In contrast the single mirror sizes for larger telescopes, like the Extremely Large Telescope (ELT) build by the ESO, is much bigger. The primary mirror of the ELT consists of 798 single elements, each 1.5 m in diameter. Such large mirrors cannot be moved around due to its weight, so the ion beam source will be moved in front of the mirror. A system for mass production of such big mirrors will be introduced.
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