Abstract
Multi-cluster tools have been used as semiconductor manufacturing equipment since the 300mm diameter wafers appeared.While the throughput analysis and scheduling problems of single-cluster tools have been well-studied,the related researches on multi-cluster tools are still at an early stage.Scheduling problems of multi-cluster tools are analyzed with residency constraints and multi-type wafers in this paper.Firstly,the mathematical model of the problems is constructed on the basis of time constraint sets.Then,a step-back tracking scheduling algorithm is put forward for scheduling multi-cluster tools.Finally,experiments are designed to evaluate the proposed algorithm.The results indicate that the proposed algorithm is feasible and valid.
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