Scattering of spatially bounded X-ray beams in lateral periodic structures

Abstract

The dynamical theory of X-ray diffraction is developed to the case when the incident and reflected X-ray beams are spatially bounded. X-ray diffraction in complicated lateral periodic structures is considered. Effects, due to periodic regular elastic deformations of a crystal lattice on an angular distribution of the scattered intensity, are investigated. Using the found solutions, numerical simulations of reciprocal space maps for crystals with periodically distributed elastic strains were performed. It was established, that for crystals modulated by a surface acoustic wave, diffraction orders consist of the main reflection vertical band and a pair of inclined bands, induced by spatially bounded X-ray beams. In the case of diffraction in crystals with the surface grating, one observes additional satellites along inclined bands caused by the spatial modulation of incident X-ray wave. Results of X-ray diffraction on a crystal modulated by a surface acoustic wave and on a crystal with a metal surface grating are presented.