Abstract
Time-of-flight scattering and recoiling spectrometry (TOF-SARS) was used to investigate the scattered and recoiled ion fractions from 3 keV Ar+ ion beams on LiTaO3(100) single crystals. The TOF-SARS measurements were found to be sensitive to the electrical properties of the crystal. ac impedance measurements of the electrical conductivity showed that LiTaO3 is an insulator at room temperature and that its conductivity increases by ∼103 at temperatures in the range 100–200 °C. This increase in conductivity could be monitored in TOF-SARS by measuring the current through the crystal induced by the impinging Ar+ ions as a function of temperature. The activation energy for this transition was estimated from both the impedance and scattering measurements to be ∼1 eV. Azimuthal anisotropy of the scattered Ar+ ions from Ta atoms was observed at room temperature but not at elevated temperatures. Scattered Ar+ ion fraction measurements showed that scattered Ar+ ions are enhanced by charge buildup on the LiTaO3 surface, whereas recoiled ions are not affected. The effects of surface charging phenomena on TOF-SARS could be eliminated by either heating the LiTaO3 crystal to ∼200 °C or by application of a low energy electron beam to the crystal surface.
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