Abstract
In this study, we report the first results of studying the characteristics of the scanning X-ray microscope that can be used with laboratory X-ray sources. This microscope is based on grazing incidence multilevel Fresnel lenses developed at the Institute of Microelectronic Technology and Ultra-High-Purity Materials [3]. A multilevel grazing-incidence Fresnel lens (GIFL) represents a step profile formed on a substrate surface, which approximates the profile of a grazing-incidence kinoform lens. The efficiency of such elements depends on the number of levels. The use of six-level GIFLs with an efficiency as high as 60‐70% (experimental data) in the Kirkpatrik‐Baez configuration in the scanning X-ray microscope designed by us makes it possible to collect about 30‐50% of incident radiation in the focal spot.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
