Abstract

We have developed a scanning vector Hall probe microscope for mapping magnetic field vector over magnetic samples. The microscope is based on a micromachined Hall sensor and the cryostat with scanning system. The vector Hall sensor active area is ∼5×5 μm 2 . It is realized by patterning three Hall probes on the tilted faces of GaAs pyramids. Data from these ‘tilted’ Hall probes are used to reconstruct the full magnetic field vector. The scanning area of the microscope is 5×5 mm 2 , space resolution 2.5 μm, field resolution ∼1 μT Hz −1/2 at temperatures 10–300 K.

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