Abstract

Scanning electron microscopy, scanning transmission electron microscopy and transmission electron microscopy are powerful tools in the analysis of crystalline materials. In combination with their associated analytical techniques, they roughly cover three length scales: the ‘supra-nm’ scale, the ‘nm’ scale and the ‘sub-nm’ scale, respectively. In this paper, the investigation of crystalline properties is presented, by means of 2D and 3D characterization examples. Techniques such as channeling contrast, electron backscatter diffraction, crystal orientation contrast on thin films and convergent beam electron diffraction are covered. Furthermore, time-efficient and site-specific focused ion beam and dual-beam sample preparation for any of the techniques above are introduced.

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