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Abstract
A scanning thermal microscope that uses a fluorescent particle as a temperature probe hasbeen developed. The particle, made of a rare-earth ion-doped fluoride glass, is glued at theextremity of a sharp tungsten tip and scanned on the surface of an electronic device. Thetemperature of the device is determined by measuring the fluorescence spectrum of theparticle at every point on the surface and by comparing the intensity variations of twoemission lines. As an example, we will show some images obtained on a nickel stripe1 µm wide, heated by an electrical current. A good agreement is observed with a simulation ofthe temperature field on the device.
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