Abstract
We developed a scanning near-field optical microscopy (SNOM) system based on frequency-modulation atomic force microscopy (FM-AFM), using a microfabricated force-sensing cantilever with a lead zirconate titanate (PZT) thin film as an integrated deflection sensor. In the system, an evanescent field is generated on the sample surface by total internal reflection, and the light transmitted through the optically transparent tip is collected by a photomultiplier while the gap distance between the tip and the sample surface is regulated by the FM detection method. We obtained a SNOM image of a sample with the nanometer-scale resolution of polystyrene particles dispersed in a polyvinyl alcohol thin film deposited onto a glass substrate with the developed SNOM/AFM system, under a completely dark condition.
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